3-D Optical Surface Profiler [ 2003 - 2003 ]

Research Grant

[Cite as]

Researchers Dr DM Kane; Dr MJ Withford; Prof CJ Sheppard; A/Prof L Zhang; Dr W Yeung; Dr GL Heness; Prof RG Horn

Brief description Establishing a state-of-the-science 3-D optical surface profiler will enable macroscopic, microscopic and nanoscopic profiling of surfaces over a very broad range of research programs including, laser cleaning and surface modification, laser precision microfabrication, surface, materials and device characterisation and optical physics applications. The importance and significance of these projects has already been established by the projects having competitive funding. The instrument will undoubtedly support many additional research programs. It is similar to an Atomic-Force-Microscope or stylus profilometer but has significant additional capabilites. These include profiling much larger areas at sub-nanometre resolution and the non-contact nature of the technique. These features will enable surface characterisation that can not be achieved by other means.

Funding Amount $288,000

Funding Scheme Linkage Infrastructure, Equipment and Facilities

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